San Francisco, USA
Visit us at:
Tec-Sem booth #2413, South Hall
CamLine booth #5989, North Hall
We present the award-winning Reticle Management Software
(RSM). Our products cover the entire reticle and carrier life cycle including mask ordering, CofC validation, incoming qualification, reticle stocker automation, reticle inspection, tracking of movements, status changes, waiver, requal, repell, repair, etc.
Our Advanced Inspection Management
provides for triggering and monitoring of reticle inspections, based on a very flexible counter and timer mechanism. Dynamic cycles per reticle or reticle group can be configured, e.g. to reflect the decreasing inspection cycles after reticle cleaning/repair, when counting the exposure dose to monitor crystal growth and haze. Automatic inspection download and analysis of all reticle inspection results (KLA Starlight/TeraScan, ASML IRIS, CANON PPC, NIKON PPD, Dr. Schenk Pollux, etc.) minimize human errors and insure that your business rules are strictly met.
Our Mask Vendor Connectivity
(MaVen) provides for monitoring of the entire reticle order process, automatic status and ETA updates from the mask house, automatic read-in and plausibility/validation checks of data prep information, reticle order files (e. g. SEMI P10
) and CofC files. Automatic emails to configurable groups of engineers can be sent, based on the validation result or other business rules. Corrective actions can be taken, before the reticle is manufactured or shipped, resulting in tremendous savings in both cost and time.
Our software provides an open interface to integrate seamlessly with any MES and MCS system, as well as photo dispatch and scheduler applications. It is in production since 1999 in many advanced fabs around the world.