RTCL – Features
- Best result of haze control and crystal growth control for reticles of any kind.
- “Smart qual strategy management” triggers inspection and cleaning cycles ahead of time.
- Reliable recipe selection prevents reticle damage on inspection tools.
- Fast recipe management optimizes inspection time and quality.
- Track all reticle movements in histories and ensure no more lost reticles.
- Enable users to prepare for coming WIP ahead of time.
- Integration with MES/CIM and WIP dispatcher / scheduler.
- Integration of all major mask houses to simplify the overview of your orders.
- Centralized Business Rules for Reticles.
- Workflows and status models can be changed quickly and easily.
- Stocker integration to enable homogeneous operation.
- Ready to use, field proven turnkey solution.
RSM GUI – Reticle Selector